Method of arranging a plurality of semiconductor structural elements on a carrier and carrier comprising a plurality of semiconductor structural elements

ABSTRACT

A method of arranging a plurality of semiconductor structural elements on a carrier includes arranging at least some of the semiconductor structural elements in multiple groups G and at least one semiconductor structural element of a group G has a property E that determines the position of the respective group G of semiconductor structural elements on the carrier.

TECHNICAL FIELD

This disclosure relates to a method of arranging semiconductorstructural elements on a carrier and to a carrier having a plurality ofsemiconductor structural elements.

BACKGROUND

To produce electronic components such as, e.g., optoelectroniccomponents or micro-electromechanical components, it is necessary, e.g.,for the quality control of the components or for further processingthereof, to know the position of the components on a carrier. To be ableto assign quality control data to individual components, it isadvantageous if a view of only a subregion of the carrier is sufficientto enable the position of the respective components on the carrier to bedetermined. Independent markings on the carrier to determine theposition of the components, for instance by determining coordinates onthe carrier, are usually based on a distance from the coordinate originand reduce the area for arranging components on the carrier.

There is nonetheless a need to provide a method of arrangingsemiconductor structural elements on a carrier and a carrier having aplurality of semiconductor structural elements that are distinguished byimproved determination of the position of the semiconductor structuralelements on the carrier.

SUMMARY

I provide a method of arranging a plurality of semiconductor structuralelements on a carrier including arranging at least some of thesemiconductor structural elements in multiple groups G and at least onesemiconductor structural element of a group G has a property E thatdetermines the position of the respective group G of semiconductorstructural elements on the carrier.

I also provide a carrier having a plurality of semiconductor structuralelements arranged on the carrier, wherein at least some of thesemiconductor structural elements are arranged in groups G, and at leastone semiconductor structural element of a group G has a property E thatdetermines the position of the respective group G on the carrier.

I further provide a method of arranging a plurality of semiconductorstructural elements on a carrier including arranging at least some ofthe semiconductor structural elements in multiple groups G and at leastone semiconductor structural element of a group G has a property E fordetermining the position of the respective group G of semiconductorstructural elements on the carrier, wherein the property E is adeviation from a homogeneous arrangement of semiconductor structuralelements.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows an arrangement of semiconductor structural elements ingroups on a carrier in a top view of the carrier.

FIG. 2 shows semiconductor structural elements in a group.

FIGS. 3, 4, 5A and 5B show the arrangement of groups in relation to oneanother.

FIGS. 6A and 6B show further possible arrangements of semiconductorstructural elements on the carrier.

LIST OF REFERENCE CHARACTERS

-   1 Carrier-   1 a Semiconductor layer sequence-   1 b Further carrier-   2 Semiconductor structural element-   4 Demarcation-   D Distance-   E Property-   G Group-   M Marking

DETAILED DESCRIPTION

In a method of arranging a plurality of semiconductor structuralelements on a carrier, at least some of the semiconductor structuralelements are arranged in multiple groups G, wherein at least onesemiconductor structural element of a group G has a property E todetermine the position of the respective group G of semiconductorstructural elements on the carrier.

The plurality of semiconductor structural elements can be any number ofsemiconductor structural elements. The number of the semiconductorstructural elements can be very high, e.g., more than 1000, typically20,000 to 500,000 or up to 1,000,000,000.

To identify individual semiconductor structural elements or regions ofsemiconductor structural elements on the carrier, each semiconductorstructural element is advantageously allocated to a group, the positionof each group on the carrier being known. The position of a group ofsemiconductor structural elements can advantageously be marked by therespective group itself. This proves advantageous because, to determinethe position of a group and thus of semiconductor structural elementswithin this group, it is thus sufficient to see only a subregion of thecarrier in which the group to be located is present, in particular thegroup itself. In other words, to determine the position of a group or anindividual semiconductor structural element, it is not necessary to lookfor a marking of coordinates on the carrier but the position of thegroup can be read off directly from the semiconductor structuralelements of the group. To this end, at least one semiconductorstructural element of the group has a property E that advantageouslyserves to determine the position. Thus, additional markings on thecarrier giving information about the position on the carrier canadvantageously be omitted. In this way, losses of the area of thecarrier that is usable for the arrangement of semiconductor structuralelements can advantageously be reduced or avoided. Advantageously,therefore, it is unnecessary to count spacings and the number ofsemiconductor structural elements lying between a marking on the carrierand the semiconductor structural element of which the position on thecarrier is to be determined. The determination of the position of asemiconductor structural element or of a group of semiconductorstructural elements can advantageously take place easily if, when thecarrier is observed, e.g., in an analytical method, only a subregion ofthe carrier can be captured or observed.

Furthermore, with a fixed size of the group, a semiconductor structuralelement can be allocated to a particular group. In this case, simplifiedquality controls are obtained, e.g., visual inspections of semiconductorstructural elements. The semiconductor structural elements canadvantageously be arranged on a carrier for inspection purposes andchecked by, e.g., electrical, visual or mechanical inspections andoperated by a control signal. This makes it possible to locate defectivesemiconductor structural elements on the carrier.

The arrangement may comprise producing a semiconductor layer sequence onthe carrier and patterning it to form the semiconductor structuralelements.

To produce the semiconductor structural elements, a semiconductor layersequence can be deposited on the carrier. For example, crystal layerscan be grown epitaxially. The carrier may comprise a substrate. Afterdepositing the semiconductor layer sequence, a patterning thereofadvantageously takes place, wherein, e.g., mesa structures areintroduced into the semiconductor layer sequence. Isolating trenches canalso advantageously be introduced into the semiconductor layer sequencethat extend to the carrier and separate the semiconductor structuralelements from one another. After this, further process stages can takeplace and the semiconductor structural elements can be provided with,e.g., metal coatings.

In the method, the arrangement may comprise producing a semiconductorlayer sequence on a further carrier and patterning it to obtain thesemiconductor structural elements and arranging the semiconductorstructural elements, which have been removed from the further carrier,on the carrier.

A production of semiconductor structural elements can alsoadvantageously take place on a further carrier and the semiconductorstructural elements can be transferred and bonded on to the carrierafter being produced. In this case it is advantageously possible thatthe further carrier comprises a growth substrate on which asemiconductor layer sequence is grown. After production of the onesemiconductor layer sequence, this can advantageously be patterned onthe further carrier such that, e.g., mesa structures are introduced intothe semiconductor layer sequence. Isolating trenches can alsoadvantageously be introduced into the semiconductor layer sequence thatextend to the further carrier and separate the semiconductor structuralelements from one another.

By a stripping process, the semiconductor structural elements can beremoved from the further carrier and deposited on the carrier in anarrangement of groups G. The semiconductor structural elements can bebonded on to the carrier, for example.

In the method, the semiconductor structural elements may be in the formof semiconductor chips.

If the semiconductor structural elements are further processed intosemiconductor chips, depending on the further processing method, thesemiconductor chips can either still have or no longer have a property Ewhich they had before being further processed into semiconductor chips.For inspection purposes, the semiconductor chips can also advantageouslybe arranged on a carrier and checked by, e.g., electrical, visual ormechanical inspections and operated by a control signal, whereinsemiconductor chips can have a property E corresponding to thesemiconductor structural elements.

In the method, a group G may comprise a matrix of n×m semiconductorstructural elements, wherein n and m are each an integer and n and m areless than or equal to 100.

The selection of the size of a group is advantageously made by thenumber of rows and columns of a matrix, wherein the semiconductorstructural elements of the respective group are advantageously arrangedin a matrix. In this way, at least some, advantageously all, of thesemiconductor structural elements can be arranged on the carrier inmatrices with dimensions n×m. The matrices can all have the samedimension or can have different dimensions. In particular, the matriceshave a dimension of 6×6, i.e., n=6 and m=6. The selection of not toolarge a matrix is advantageous because, when the carrier with thesemiconductor structural elements is observed microscopically, theentire matrix to which the semiconductor structural element beingobserved is assigned is advantageously still visible. As a result, it isadvantageously possible to determine the position immediately based onall the semiconductor structural elements in the group. In particular, nand m are less than or equal to 10.

A coding may be allocated to a group G, wherein the coding of the groupis created based on how the semiconductor structural elements with theproperty E are arranged in the respective group G.

The semiconductor structural elements in a group are advantageouslyprovided with a binary state “1” or “0” according to whether or not theyhave the property E. Consequently, at least one semiconductor chip froma group, in particular each semiconductor structural element in thegroup, is allocated a number 0 or 1. According to the arrangement of thesemiconductor structural elements in the group, a sequence of numbers of0 and 1 is obtained, corresponding to an integer in binary code.Advantageously here, the arrangement of semiconductor structuralelements along the first row, then along the second row and so on up tothe last semiconductor structural element of the last row, is taken intoaccount. Alternatively, however, any other sequence of the semiconductorstructural elements can also be taken into account. The semiconductorstructural elements within a group having the property E canadvantageously be defined during or after the arrangement of thesemiconductor structural elements. By calculating and coding a checksum,an error within a group can be corrected. For example, in an arrangementof 6×6 semiconductor structural elements an error correction takes placesuch that the first 5×6 semiconductor structural elements correspond tothe coding of the position and the last 6 semiconductor structuralelements correspond to the checksum of the first 5×6 semiconductorstructural elements.

Furthermore, it is possible that the semiconductor structural elementshave more than one property E. Consequently, a semiconductor structuralelement can take on more than two states and can be provided with aternary, quaternary or higher-order coding.

At least one semiconductor structural element of a group G may have amarking M, by which an arrangement of the semiconductor structuralelements can be identified as a group G.

The marking can be, e.g., a colored label, an inscription, a surfacestructure or similar. The absence of a semiconductor structural elementcan also represent a marking. The semiconductor structural element withthe marking indicates, e.g., the start of a group on the carrier. Thus,the outermost semiconductor structural element at the top left of thegroup can advantageously comprise the marking as the start of the group.With a known size of the group, all semiconductor structural elementsbelonging to the group can then be clearly allocated. Alternatively, itis possible that an arbitrary semiconductor structural element from thegroup comprises the marking, in which case it must be established inwhat region around the semiconductor structural element with the markingthe semiconductor structural elements still belong to the particulargroup. Advantageously, all markings of all groups can be identical. Itis also possible that multiple semiconductor structural elements withina group have a marking or multiple markings.

It is furthermore possible that a group is marked by multiplesemiconductor structural elements having the property E. For example,within a group a 2×2 matrix with semiconductor structural elementshaving the property E at a specific position, for instance in the topleft-hand corner of any group G, acts as a marking for the group. Thisadvantageously results in a clear labelling of a group G. It isadvantageously unnecessary for the groups G to have demarcations orenlarged spacings from one another.

An arrangement of groups G may repeat multiple times on the carrier,wherein the groups have a specific arrangement of semiconductorstructural elements with the property E.

The semiconductor structural elements on the carrier can have arepeating number N of groups G on the carrier, wherein the groups of thenumber N each have semiconductor structural elements with properties Esuch that the properties E are always distributed equally within thegroup and the position of the group within the number of groups isalways identical. For example, an adjacent arrangement of four groupsrepeats multiple times on the carrier, wherein in each arrangement, eachof the four groups is identical with respect to the distribution of theproperty E and the position of the group within the arrangements. It isadvantageously possible to find the arrangement of four groups, i.e.,the repeating number N, on the carrier easily during an analyticalmethod and to use them for position determination. Formation of therepeating number N can take place, e.g., by lithographic methods.

The groups G may be arranged on the carrier such that adjacent groupsare at a distance from one another which is greater than the distancebetween the semiconductor structural elements within a group.

To separate adjacent groups on the carrier, the distance between thegroups can advantageously be formed such that a demarcation of thegroups from one another is clearly recognizable. This can advantageouslybe achieved by arranging semiconductor structural elements within thegroups at a distance from one another advantageously smaller than thedistance of the groups from one another. It is advantageously possiblehere to arrange the semiconductor structural elements within the groupsat the same distances from one another so that the association of therespective semiconductor structural elements with the correspondinggroup can be made quickly and easily.

A demarcation between the groups G may be arranged on the carrier.

Advantageously, a demarcation is arranged at least between two groups.It is also possible to arrange a demarcation between all groups on thecarrier. The demarcation can also be arranged around at least one group,surrounding it. Advantageously, the groups between which a demarcationis arranged are at no greater distance from one another than when nodemarcation is present between the respective groups. One group canadvantageously be separated from another by a demarcation.

The property E may be a brightness or a brightness level of thesemiconductor structural element or a subregion of a semiconductorstructural element.

If the brightness of the semiconductor structural element is determinedto be the property E to determine the position of the group ofsemiconductor structural elements on the carrier, the information onwhether the semiconductor structural element appears bright or dark canadvantageously be used for each semiconductor structural element fromthe respective group. For example, each group can be allocated a binarycode relating to the arrangement of semiconductor structural elementsappearing bright and dark in the group. The arrangement of thesemiconductor chips appearing bright and dark can advantageously bepredefined to enable the position of the respective group to bedetermined. Furthermore, the semiconductor structural element can alsohave a brightness level such as bright, medium-bright and dark, orfurther intermediate steps, wherein the individual brightness levelscorrespond to one of the properties E.

The property E may be a geometric shape of the semiconductor structuralelement.

The semiconductor structural elements or the subregions thereof canadvantageously have a predefined shape or, in principle, any shape, seenin a top view. With respect to the property E of the semiconductorstructural element contributing to position determination, or asubregion thereof, the predefined shape can be, e.g., a rectangular,circular, elliptical or step shape. Other shapes are also possible.Again, each arrangement of semiconductor structural elements within agroup can advantageously be allocated a coding.

The property E may be a deviation from a homogeneous arrangement ofsemiconductor structural elements.

The semiconductor structural elements can advantageously be arrangedwithin a group in rows and columns of a matrix. Furthermore, it ispossible that individual semiconductor structural elements are arrangedsuch that they are displaced from the straight arrangement within a row.The semiconductor structural elements within a group can differ from oneanother, e.g., only by whether or not they are positionally displaced ina row. The displacement can advantageously take place in any directionof the two-dimensional carrier, a semiconductor structural element beingdisplaced only by a distance advantageously smaller than the distancebetween the semiconductor structural elements within a group. Adisplaced semiconductor structural element thus has the property E todetermine the position on the carrier. Again, each arrangement ofsemiconductor structural elements within a group can advantageously beallocated a coding with respect to the property E.

The property E may be a rotated arrangement of the semiconductorstructural element.

The semiconductor structural elements can advantageously be arranged ina matrix in a group, wherein those semiconductor structural elementswhich, in a top view of the carrier, are rotated about an axis, the axisbeing perpendicular to the carrier, have the property E. The rotation ofthe semiconductor structural elements can advantageously be equal forall semiconductor structural elements with the property E, equal withinonly one group or different within a group. The property E can alsoadvantageously be recognized only as a rotation per se or differentangles of rotation can be taken into account. Again, each arrangement ofsemiconductor structural elements within a group can advantageously beallocated a coding.

Patterning of the semiconductor layer sequence may take place by anetching process.

By an etching process, the semiconductor layer sequence can be providedwith isolating trenches or mesa structures. It is furthermore possiblethat individual semiconductor structural elements are removed. In thisway, an absence of a semiconductor structural element can also be usedas a marking, for instance of a group G.

The carrier comprises a plurality of semiconductor structural elementsarranged on the carrier, wherein at least some of the semiconductorstructural elements are arranged in groups G and at least onesemiconductor structural element of a group G has a property E todetermine the position of the respective group G on the carrier.

The plurality of semiconductor structural elements can be any number ofsemiconductor structural elements advantageously connected on thecarrier to emit light. The semiconductor structural elements cancomprise, e.g., semiconductor chips such as for instance light-emittingdiodes. The arrangement of the semiconductor structural elements on thecarrier advantageously allows simplified quality controls, e.g., visualinspections of semiconductor chips. The semiconductor structuralelements can be inspected, e.g., by photoluminescence, electron beammicroscopy or surface analyses. The semiconductor structural elementscan advantageously be operated on a carrier by a control signal forinspection purposes. It is possible that the position is determined by afirst analytical stage, e.g., by optical microscopy, and in a furtherstage a quality control or a processing of the semiconductor structuralelements takes place.

The number of semiconductor structural elements can be very high, e.g.,more than 1000, typically 20,000 to 500,000 or up to 1,000,000,000.

Further advantageous examples of the carrier and associated advantagescan be taken from the description of the method and are therefore notexplained again.

According to at least one example of the carrier, the groups G arearranged on the carrier at a distance from one another, the distancebeing greater than the distance between the semiconductor structuralelements within a group G.

To separate adjacent groups on the carrier, a distance canadvantageously be formed between the groups such that a demarcation ofthe groups from one another is clearly recognizable. It isadvantageously possible in this case that the semiconductor structuralelements within the groups are arranged at the same distances from oneanother so that a clear association of the respective semiconductorstructural elements with the corresponding group is obtained.

A demarcation may be arranged between the groups G on the carrier.

A demarcation of groups from one another can advantageously be achievedby a demarcation arranged at least between two adjacent groups orbetween multiple groups or surrounding all groups. Advantageously, thegroups between which a demarcation is arranged are either at no greaterdistance from one another than when no demarcation is present betweenthe respective groups or the demarcation is arranged in a wideneddistance between the adjacent groups.

By a demarcation, one group can advantageously be separated from anotheror a group can be demarcated from an arbitrarily arranged quantity ofsemiconductor structural elements.

Further advantages, advantageous developments can be taken from theexamples described below in association with the figures.

Identical elements or elements having the same effect are each providedwith the same reference character in the figures. The componentsillustrated in the figures and the size ratios to one another of thecomponents should not be considered as being to scale.

FIG. 1 shows a top view of a carrier 1, wherein the carrier 1 canadvantageously be a wafer. On the carrier 1, groups G of semiconductorstructural elements are arranged. FIG. 1 shows an arrangement in whichall the semiconductor structural elements of the carrier 1 are arrangedin groups G. Consequently, each semiconductor structural element that isarranged on the carrier 1 can advantageously be assigned to a group G.The groups G are arranged in a rectangular pattern. Alternatively, it isalso possible that a plurality of groups G are arranged in an arbitrarymanner on the carrier 1. The carrier 1 in FIG. 1 is circular but can beany shape.

FIG. 2 shows an arrangement of semiconductor structural elements 2within a group G, wherein the semiconductor structural elements 2 form amatrix with 4 rows and 4 columns. Some of the semiconductor structuralelements 2 of the group G have a property E. The property E is, e.g.,the brightness of the particular semiconductor structural element 2.Thus, for instance, the property E can be assigned to a semiconductorstructural element 2 if the semiconductor structural element appearsdark. The reverse case is also possible, should the property be definedas a bright appearance of the semiconductor structural element. From anarrangement of semiconductor structural elements 2 having the property Eas semiconductor structural elements appearing dark, the group G can beassigned a binary code. Thus, according to FIG. 2 the first row with,from the left, a sequence of a dark, a bright, a dark and another darksemiconductor structural element is registered as binary code 1011 forthe first row. For the second row, a binary code of 0011 is obtained,for the third row 0100 and for the fourth row 1000. After stringingtogether the binary codes for the rows, an overall code of1011001101001000 is obtained, which can be converted to a decimal numberof 45896. If the position on the carrier at which the group G with thecode 45896 is arranged is known, this can be located on the carrier byobserving the group without seeing further groups or a marking on thecarrier from which coordinates on the carrier could be read off. In thisway, each group G can advantageously be allocated its own binary codefor position determination and each semiconductor structural element inthis group can be located on the carrier.

FIG. 3 shows four groups G of semiconductor structural elements 2 in atop view, wherein the groups are each at a distance D from one another.The distance D is advantageously greater than the distance of thesemiconductor structural elements 2 from one another within a group G.Each group comprises an arrangement of semiconductor structural elements2 in four rows and four columns. Some of the semiconductor structuralelements 2 within a group G advantageously have a property E. Accordingto the arrangement of semiconductor structural elements 2 with theproperty E in a group G, each group can be allocated a binary code, thecodes for each group differing from one another. The distance Dadvantageously enables each semiconductor structural element 2 to beassigned to a group G.

FIG. 4 shows the four groups G of semiconductor structural elements 2from FIG. 3, wherein the distance D between the groups G is no greaterthan the distance of the semiconductor structural elements 2 from oneanother within a group G. In this way, a space-saving arrangement ofsemiconductor structural elements 2 on a carrier is advantageouslyachieved. However, demarcation of the groups G from one another is mademore difficult. The group has a marking M, which advantageouslyindicates the start of a group G of semiconductor structural elements 2.For example, the first semiconductor structural element 2 arranged inthe top left-hand corner of the matrix of a group, has the marking M ineach case. The marking can alternatively be arranged on anysemiconductor structural element 2. The marking M can compriselettering, a vertical line or similar. It is advantageously unnecessaryfor the semiconductor structural element 2 provided with the marking Mto have the property E. However, it is also possible that thesemiconductor structural element 2 with the marking also has theproperty E.

FIG. 5A shows the four groups G of semiconductor structural elements 2from FIG. 3, wherein a distance D is present between the groups G and ademarcation 4 is arranged between the groups. In FIG. 5A, the distance Dis not widened as a result of the demarcation 4, but an increase ordecrease in the distance D is possible here. The groups G are clearlydemarcated from one another by the demarcation 4.

FIG. 5B shows four groups G of semiconductor structural elements 2,wherein a marking of a group takes place with semiconductor structuralelements 2 having the property E. A 2×2 matrix in the top left-handcorner of each group G advantageously comprises semiconductor structuralelements 2 all of which appear dark, wherein a semiconductor structuralelement 2 appearing dark is registered as having the property E. Thisadvantageously results in a clear labelling of a group G. It isadvantageously unnecessary for the groups G to have demarcations orincreased distances from one another. In FIG. 5B, a group G is labelledwith a broken line for illustration purposes only. To label a group, the2×2 matrix with the semiconductor structural elements 2 appearing darkis advantageously not repeated at other positions within the same groupG and is also not repeated within the same group together with thesemiconductor structural elements located at the edge of the adjacentgroups. Alternatively, other specific arrangements of chips withproperty E occurring only at the start of a group are also possible.

FIG. 6A shows an arrangement of semiconductor structural elements 2 in amatrix of a group G. The property E for position determination comprisesa semiconductor structural element 2 displaced from a straightarrangement in a row of the matrix. The displacement is advantageouslysmaller than the mutual distance between the semiconductor structuralelements 2 within the matrix and large enough for the displacement to beimmediately recognizable when the matrix is observed. The displacementof the semiconductor structural elements 2 with the property E takesplace in FIG. 6A from the row in which the respective semiconductorstructural element 2 is arranged towards the adjacent row there below.

FIG. 6B shows semiconductor structural elements 2, wherein thesemiconductor structural elements 2 have a property E for positiondetermination if they are rotated relative to a semiconductor structuralelement 2 arranged straight such as the semiconductor structural elementon the extreme left in FIG. 6B. The direction of rotation isadvantageously arbitrary and can comprise different angles of rotation.It is advantageously possible that the rotation of a semiconductorstructural element 2 is, by itself, sufficient to assign the property Ethereto. Thus, the respective semiconductor structural elements do notall have to be rotated by exactly the same angles of rotation in thesame direction to have the property E. Furthermore, it is possible thatspecific angles of rotation constitute the properties E and are assignedto the semiconductor structural elements.

The description of my methods and carriers with the aid of the examplesdoes not limit this disclosure thereto. Rather, this disclosurecomprises any new feature and any combination of features, which inparticular includes any combination of features in the appended claims,even if the feature or combination is not itself explicitly stated inthe claims or examples.

This application claims priority of DE 10 2015 112 962.0, the subjectmatter of which is incorporated herein by reference.

1-18. (canceled)
 19. A method of arranging a plurality of semiconductorstructural elements on a carrier comprising arranging at least some ofthe semiconductor structural elements in multiple groups G and at leastone semiconductor structural element of a group G has a property E thatdetermines the position of the respective group G of semiconductorstructural elements on the carrier.
 20. The method according to claim19, wherein the arranging comprises producing a semiconductor layersequence on the carrier and patterning it to form the semiconductorstructural elements.
 21. The method according to claim 19, wherein thearranging comprises producing a semiconductor layer sequence on afurther carrier and patterning it to form the semiconductor structuralelements and arranging the semiconductor structural elements that havebeen removed from the further carrier on the carrier.
 22. The methodaccording to claim 19, wherein the semiconductor structural elements arein the form of semiconductor chips.
 23. The method according to claim19, wherein a group G comprises a matrix of n×m semiconductor structuralelements, wherein n and m are each an integer and n and m are less thanor equal to
 100. 24. The method according to claim 19, wherein a codingis assigned to a group G, and the coding for the group is created basedon how the semiconductor structural elements with the property E arearranged in the respective group G.
 25. The method according to claim19, wherein at least one semiconductor structural element of a group Ghas a marking M by which an arrangement of semiconductor structuralelements can be identified as a group G.
 26. The method according toclaim 19, wherein an arrangement of groups G, wherein the groups have aspecific arrangement of semiconductor structural elements with theproperty E, repeats multiple times on the carrier.
 27. The methodaccording to claim 19, wherein the groups G are arranged on the carriersuch that adjacent groups are at a distance from one another greaterthan the distance between the semiconductor structural elements within agroup G.
 28. The method according to claim 19, wherein a demarcation isarranged between the groups G on the carrier.
 29. The method accordingto claim 19, wherein the property E is a brightness or a brightnesslevel of the semiconductor structural element or a subregion of thesemiconductor structural element.
 30. The method according to claim 19,wherein the property E is a geometric shape of the semiconductorstructural element.
 31. The method according to claim 19, wherein theproperty E is a deviation from a homogeneous arrangement ofsemiconductor structural elements.
 32. The method according to claim 19,wherein the property E is a rotated arrangement of the semiconductorstructural element.
 33. The method according to claim 19, wherein thepatterning of the semiconductor layer sequence takes place by an etchingprocess.
 34. A carrier having a plurality of semiconductor structuralelements arranged on the carrier, wherein at least some of thesemiconductor structural elements are arranged in groups G, and at leastone semiconductor structural element of a group G has a property E thatdetermines the position of the respective group G on the carrier. 35.The carrier according to claim 34, wherein the groups G are arranged ata distance from one another on the carrier, and the distance is greaterthan the distance between the semiconductor structural elements within agroup G.
 36. The carrier according to claim 34, wherein a demarcation isarranged between the groups G on the carrier.
 37. The carrier accordingto claim 35, wherein a demarcation is arranged between the groups G onthe carrier.
 38. A method of arranging a plurality of semiconductorstructural elements on a carrier comprising arranging at least some ofthe semiconductor structural elements in multiple groups G and at leastone semiconductor structural element of a group G has a property E fordetermining the position of the respective group G of semiconductorstructural elements on the carrier, wherein the property E is adeviation from a homogeneous arrangement of semiconductor structuralelements.